| Temp Range:150 to 1300 deg C, continue working time at 1000C >1 h |
| Rate of Temp Rise:0.01 - 180 deg C/sec presetable |
| Quartz Chamber Inner Size:210mm x 140mm x 14mm |
| Wafer Size:Up to maximum 4" |
| PC Controller:Progrmable 500 temp curve,Each curve includes 100 section,Temp preset range 100 - 1250 deg C,Time preset range 1 - 30,000 sec |
| Manual Control:Time preset range 1 - 9999 secTemp 100 - 1300 deg C |
| Double closed loop temp control with stability of +/- 2 deg C |
| Computer:CPU 2.1G, RAM 128M, HD 40G, Win98 system |
| Light Source:1.25kw x 13 halogen lamps |
| Power Supply:380 V 32A 3 phase |
| Outline Size:Power supply box 440mm x 200mm x 520mmOven box 440mm x 20mm0 x 520mm |
| Cooling Water:6 - 8 L/min |